Development of Mechanical Sensors Based on Flat Coil Element

Djamal, Mitra and Sundari, Ellys Mei and Kumalasari, Ratih and Ramli, Ramli (2012) Development of Mechanical Sensors Based on Flat Coil Element. In: Latest Advances in Information Science, Circuits and Systems, 13-15 Juni 2012, Iasi, Romania.

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Abstract

Distance is a physical quantity that used in many applications. In the field of sensor, distance is a main physical quantity that can be used for many measurements. In this paper, we will show the use of flat coil element for measuring proximity. Based on this ability, sensors for measuring mechanical quantities such as pressure, vibration and torque have been developed. As a proximity sensor, the flat coil element is used to measure the position of an object (seismic mass) as a function of time. Its working principle is based on position change of a seismic mass that put in front of a flat coil element. The flat coil is a part of a LC oscillator. The change of seismic mass position will change its resonance frequency. Based on the developed flat coil element, an air pressure sensor has been successfully developed. The working area of the developed pressure sensor can be set by adjusting the membrane thickness. The flat coil element has also been developed for vibration sensor and earthquake sensor. For earthquake measurement, the sensor should measure vibration in very low frequency range. The developed earthquake sensor can be used to measure vibration until 0.2 Hz. We have also successfully developed a torque sensor with relative error under 3%.

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