Ramli, Ramli and Jonuarti, Riri and Hartono, Ambran (2017) Analisis Struktur Nano dari Lapisan Tipis Cobalt Ferrite yang Dipreparasi dengan Metode Sputtering. Eksakta Berkala Ilmiah Bidang MIPA, 18 (1). pp. 46-53. ISSN 1411-3724
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Abstract
In this paper we report the results of studies relating to the synthesis of Cobalt Ferrite (CoFe2O4) thin films by a sputtering method. The CoFe2Othin film has been preparedonto silicon substrate from the sputtering targets, CoFe. Structural propertiesofthinfilms were characterized byx-ray diffraction and the morphology was characterized by scanning electron microscopy. The growth parameter are: base pressure 2,8 x 10-24 Torr, ratio of Argon:Oxygen flow rate are 100:50 sccm, depositionpressure 5.4 x10 -1Torr, growth temperature 100oC.Nanostructures of the thin film thathave been analyzed are crystallite size and micro strain.We obtained the crystallite sizeof CoFe2Othin films for layer thickness of 40 and 48 nm, respectively are: 32 nm and66 nm, while the micro strain is 8.0 x 104-4and 10.2 x 10.-4
| Item Type: | Article |
|---|---|
| Subjects: | Q Science > QC Physics |
| Divisions: | Fakultas Matematika dan Ilmu Pengetahuan Alam > Fisika - S1 |
| Depositing User: | Mrs. Wiwi Sartika |
| Date Deposited: | 05 Feb 2018 02:47 |
| Last Modified: | 05 Feb 2018 02:47 |
| URI: | http://repository.unp.ac.id/id/eprint/12606 |
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